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FEI Helios
- Equipped with a Elstar electron gun and monochromator
- Electron beam resolution down to 0.6nm from 15kV to 2kV
- Tomahawk Ga+ ion column can be operated between 65nA and 500V
- EDAX Energy Dispersive Spectroscopy (EDS) and Electron Backscatter Diffraction (EBSD) analysis systems
- AutoTEMTM option
- Slice and View 3DTM FIB Tomography