Hitachi S-3400N Type II / ThermoNORAN NSS EDS: Variable Pressure SEM - Tungsten thermionic emitter, Quad Bias; Resolution 30nm at 3KV, 3nm at 30KV; SE and BSE; Samples as tall as 30mm; Chamber pressure 6 to 270 Pa in variable pressure mode; EDS detection range Boron and higher; EDS Quant, line, map, imaging.