Hitachi S-4800 Type II / ThermoNORAN NSS EDS: Field-Emission SEM - Cold field emission electron gun; Resolution 1nm at 15 KV, 1.4nm at 1KV; Magnification 20X to 800,000X; Imaging voltages 100V to 30KV; STEM detector; BSE low and/or high angle; EDS detection range Boron and higher; EDS Quant, line, map, imaging.